TY - JOUR
T1 - A fully integrated near-field optical, far-field optical, and normal-force scanned probe microscope
AU - Lieberman, Klony
AU - Ben-Ami, Nily
AU - Lewis, Aaron
PY - 1996/10
Y1 - 1996/10
N2 - We present a near-field scanning optical microscope (NSOM) which fully integrates near-field and far-field optics with scanned probe microscopy (SPM). The instrument incorporates a novel, flat scanning system that allows the NSOM/SPM head to be placed directly on the sample stage of any upright or inverted optical microscope and fully integrates the two microscopes. The near-field optical microscope that is designed around this flat scanner utilizes cantilevered optical force sensing probes that we have developed. Thus, the instrument can simultaneously image in a number of topographic and optical modes. The normal force sensing capability of our probes and microscope provides a significant advantage over straight optical fibers and the shear force detection techniques that are employed. The piezoelectric scanner incorporates X, Y, and Z scan ranges of over 40 μm into a flat stage less than 7 mm high. The scanning stage also provides for inertial translation of a sample over many millimeters. This completely and transparently integrates the technologies of near-field optics and other scanned probe microscopies with conventional far-field optical microscopy. Furthermore, the axial positioning capability of the flat scanner enhances the characteristics of the far-field microscope by allowing for three-dimensional optical sectioning that is required in techniques such as confocal imaging, nonlinear optical microscopies, and charge coupled device (CCD) imaging. Finally, the X, Y, and Z precision movements also have the potential for being used in optical tweezer applications.
AB - We present a near-field scanning optical microscope (NSOM) which fully integrates near-field and far-field optics with scanned probe microscopy (SPM). The instrument incorporates a novel, flat scanning system that allows the NSOM/SPM head to be placed directly on the sample stage of any upright or inverted optical microscope and fully integrates the two microscopes. The near-field optical microscope that is designed around this flat scanner utilizes cantilevered optical force sensing probes that we have developed. Thus, the instrument can simultaneously image in a number of topographic and optical modes. The normal force sensing capability of our probes and microscope provides a significant advantage over straight optical fibers and the shear force detection techniques that are employed. The piezoelectric scanner incorporates X, Y, and Z scan ranges of over 40 μm into a flat stage less than 7 mm high. The scanning stage also provides for inertial translation of a sample over many millimeters. This completely and transparently integrates the technologies of near-field optics and other scanned probe microscopies with conventional far-field optical microscopy. Furthermore, the axial positioning capability of the flat scanner enhances the characteristics of the far-field microscope by allowing for three-dimensional optical sectioning that is required in techniques such as confocal imaging, nonlinear optical microscopies, and charge coupled device (CCD) imaging. Finally, the X, Y, and Z precision movements also have the potential for being used in optical tweezer applications.
UR - http://www.scopus.com/inward/record.url?scp=0030262921&partnerID=8YFLogxK
U2 - 10.1063/1.1147175
DO - 10.1063/1.1147175
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AN - SCOPUS:0030262921
SN - 0034-6748
VL - 67
SP - 3567
EP - 3572
JO - Review of Scientific Instruments
JF - Review of Scientific Instruments
IS - 10
ER -