A new method for contactless conductivity measurement of a semiconductor layer

V. Zevin*, J. T. Suss, A. Zemel, S. Rotter

*Corresponding author for this work

Research output: Contribution to journalArticlepeer-review

1 Scopus citations

Abstract

A semiconducting layer, placed on an insulating substrate which contains paramagnetic impurities, distorts the electron paramagnetic resonance (EPR) lineshape of the impurities. This distortion can be used to monitor the conductivity of the semiconducting layer. The method is demonstrated on p-type InSb crystals on a ruby (Al2O3:Cr3+) substrate. The results are in good agreement with independent direct resistivity measurement.

Original languageEnglish
Pages (from-to)553-555
Number of pages3
JournalSolid State Communications
Volume66
Issue number5
DOIs
StatePublished - May 1988

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