A simple lateral force sensing technique for near-field micropattern generation

Anatoly Shchemelinin; Michael Rudman; Klony Lieberman; Aaron Lewis

doi:10.1063/1.1144280

A simple lateral force sensing technique for near-field micropattern generation

Anatoly Shchemelinin^*
, Michael Rudman
, Klony Lieberman
, Aaron Lewis

^*Corresponding author for this work

The Institute of Applied Physics

Research output: Contribution to journal › Article › peer-review

42 Scopus citations

Abstract

We present a simple and general purpose implementation for monitoring the lateral forces between a near-field optical probe and a surface. A feedback system based on this technique has been incorporated into a near-field optical fabrication system based on heatless material removal with an argon fluoride excimer laser. This has allowed the construction of an instrument that is capable of directly patterning a wide variety of materials with a resolution of less than 50 nm.

Original language	English
Pages (from-to)	3538-3541
Number of pages	4
Journal	Review of Scientific Instruments
Volume	64
Issue number	12
DOIs	https://doi.org/10.1063/1.1144280
State	Published - 1993

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10.1063/1.1144280

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@article{b0550ab3fc5f42f3aea2b8621d618c1f,

title = "A simple lateral force sensing technique for near-field micropattern generation",

abstract = "We present a simple and general purpose implementation for monitoring the lateral forces between a near-field optical probe and a surface. A feedback system based on this technique has been incorporated into a near-field optical fabrication system based on heatless material removal with an argon fluoride excimer laser. This has allowed the construction of an instrument that is capable of directly patterning a wide variety of materials with a resolution of less than 50 nm.",

author = "Anatoly Shchemelinin and Michael Rudman and Klony Lieberman and Aaron Lewis",

year = "1993",

doi = "10.1063/1.1144280",

language = "אנגלית",

volume = "64",

pages = "3538--3541",

journal = "Review of Scientific Instruments",

issn = "0034-6748",

publisher = "American Institute of Physics",

number = "12",

}

TY - JOUR

T1 - A simple lateral force sensing technique for near-field micropattern generation

AU - Shchemelinin, Anatoly

AU - Rudman, Michael

AU - Lieberman, Klony

AU - Lewis, Aaron

PY - 1993

Y1 - 1993

N2 - We present a simple and general purpose implementation for monitoring the lateral forces between a near-field optical probe and a surface. A feedback system based on this technique has been incorporated into a near-field optical fabrication system based on heatless material removal with an argon fluoride excimer laser. This has allowed the construction of an instrument that is capable of directly patterning a wide variety of materials with a resolution of less than 50 nm.

AB - We present a simple and general purpose implementation for monitoring the lateral forces between a near-field optical probe and a surface. A feedback system based on this technique has been incorporated into a near-field optical fabrication system based on heatless material removal with an argon fluoride excimer laser. This has allowed the construction of an instrument that is capable of directly patterning a wide variety of materials with a resolution of less than 50 nm.

UR - https://www.scopus.com/pages/publications/0000273633

U2 - 10.1063/1.1144280

DO - 10.1063/1.1144280

M3 - ???researchoutput.researchoutputtypes.contributiontojournal.article???

AN - SCOPUS:0000273633

SN - 0034-6748

VL - 64

SP - 3538

EP - 3541

JO - Review of Scientific Instruments

JF - Review of Scientific Instruments

IS - 12

ER -

A simple lateral force sensing technique for near-field micropattern generation

Abstract

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