AFM integrated with SEM/FIB for complete 3D metrology measurements

Aaron Lewis, A. Komissar, A. Ignatov, Oleg Fedoroyov, E. Maayan, Dalia Yablon

Research output: Contribution to journalConference articlepeer-review

1 Scopus citations
Original languageEnglish
Pages (from-to)1112-1113
Number of pages2
JournalMicroscopy and Microanalysis
Volume20
Issue number3
DOIs
StatePublished - 1 Aug 2014
EventMicroscopy and Microanalysis 2014, M and M 2014 - Hartford, United States
Duration: 3 Aug 20147 Aug 2014

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