Original language | English |
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Pages (from-to) | 1112-1113 |
Number of pages | 2 |
Journal | Microscopy and Microanalysis |
Volume | 20 |
Issue number | 3 |
DOIs | |
State | Published - 1 Aug 2014 |
Event | Microscopy and Microanalysis 2014, M and M 2014 - Hartford, United States Duration: 3 Aug 2014 → 7 Aug 2014 |
AFM integrated with SEM/FIB for complete 3D metrology measurements
Aaron Lewis, A. Komissar, A. Ignatov, Oleg Fedoroyov, E. Maayan, Dalia Yablon
Research output: Contribution to journal › Conference article › peer-review
1
Scopus
citations