AFM integrated with SEM/FIB for complete 3D metrology measurements

Aaron Lewis; A. Komissar; A. Ignatov; Oleg Fedoroyov; E. Maayan; Dalia Yablon

doi:10.1017/S1431927614007296

AFM integrated with SEM/FIB for complete 3D metrology measurements

Aaron Lewis
, A. Komissar
, A. Ignatov
, Oleg Fedoroyov
, E. Maayan
, Dalia Yablon

The Institute of Applied Physics

Research output: Contribution to journal › Conference article › peer-review

2 Scopus citations

Original language	English
Pages (from-to)	1112-1113
Number of pages	2
Journal	Microscopy and Microanalysis
Volume	20
Issue number	3
DOIs	https://doi.org/10.1017/S1431927614007296
State	Published - 1 Aug 2014
Event	Microscopy and Microanalysis 2014, M and M 2014 - Hartford, United States Duration: 3 Aug 2014 → 7 Aug 2014

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title = "AFM integrated with SEM/FIB for complete 3D metrology measurements",

author = "Aaron Lewis and A. Komissar and A. Ignatov and Oleg Fedoroyov and E. Maayan and Dalia Yablon",

year = "2014",

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AU - Lewis, Aaron

AU - Komissar, A.

AU - Ignatov, A.

AU - Fedoroyov, Oleg

AU - Maayan, E.

AU - Yablon, Dalia

PY - 2014/8/1

Y1 - 2014/8/1

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SN - 1431-9276

VL - 20

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JF - Microscopy and Microanalysis

IS - 3

T2 - Microscopy and Microanalysis 2014, M and M 2014

Y2 - 3 August 2014 through 7 August 2014

ER -

AFM integrated with SEM/FIB for complete 3D metrology measurements

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