Calibration of oxygen Auger signal from single-crystal ZnO surfaces

S. Z. Weisz, O. Resto, Y. Goldstein

Research output: Contribution to journalArticlepeer-review

7 Scopus citations

Abstract

The Auger spectra of the polar and prism surfaces of single-crystal ZnO were measured. The sensitivity factors derived from the differentiated spectra are 0.26 and 0.25 for a beam energy of 3 and 5 keV, respectively. These values agree fairly well with the theoretical calculations of Mroczkowski and Lichtman.

Original languageEnglish
Pages (from-to)302-304
Number of pages3
JournalJournal of Vacuum Science and Technology A: Vacuum, Surfaces and Films
Volume5
Issue number3
DOIs
StatePublished - May 1987

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