Abstract
The Auger spectra of the polar and prism surfaces of single-crystal ZnO were measured. The sensitivity factors derived from the differentiated spectra are 0.26 and 0.25 for a beam energy of 3 and 5 keV, respectively. These values agree fairly well with the theoretical calculations of Mroczkowski and Lichtman.
Original language | English |
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Pages (from-to) | 302-304 |
Number of pages | 3 |
Journal | Journal of Vacuum Science and Technology A: Vacuum, Surfaces and Films |
Volume | 5 |
Issue number | 3 |
DOIs | |
State | Published - May 1987 |