Calibration of oxygen Auger signal from single-crystal ZnO surfaces

S. Z. Weisz; O. Resto; Y. Goldstein

doi:10.1116/1.574149

Calibration of oxygen Auger signal from single-crystal ZnO surfaces

S. Z. Weisz, O. Resto, Y. Goldstein

Racah Institute of Physics

Research output: Contribution to journal › Article › peer-review

7 Scopus citations

Abstract

The Auger spectra of the polar and prism surfaces of single-crystal ZnO were measured. The sensitivity factors derived from the differentiated spectra are 0.26 and 0.25 for a beam energy of 3 and 5 keV, respectively. These values agree fairly well with the theoretical calculations of Mroczkowski and Lichtman.

Original language	English
Pages (from-to)	302-304
Number of pages	3
Journal	Journal of Vacuum Science and Technology A: Vacuum, Surfaces and Films
Volume	5
Issue number	3
DOIs	https://doi.org/10.1116/1.574149
State	Published - May 1987

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title = "Calibration of oxygen Auger signal from single-crystal ZnO surfaces",

abstract = "The Auger spectra of the polar and prism surfaces of single-crystal ZnO were measured. The sensitivity factors derived from the differentiated spectra are 0.26 and 0.25 for a beam energy of 3 and 5 keV, respectively. These values agree fairly well with the theoretical calculations of Mroczkowski and Lichtman.",

author = "Weisz, \{S. Z.\} and O. Resto and Y. Goldstein",

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AU - Resto, O.

AU - Goldstein, Y.

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N2 - The Auger spectra of the polar and prism surfaces of single-crystal ZnO were measured. The sensitivity factors derived from the differentiated spectra are 0.26 and 0.25 for a beam energy of 3 and 5 keV, respectively. These values agree fairly well with the theoretical calculations of Mroczkowski and Lichtman.

AB - The Auger spectra of the polar and prism surfaces of single-crystal ZnO were measured. The sensitivity factors derived from the differentiated spectra are 0.26 and 0.25 for a beam energy of 3 and 5 keV, respectively. These values agree fairly well with the theoretical calculations of Mroczkowski and Lichtman.

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JO - Journal of Vacuum Science and Technology A: Vacuum, Surfaces and Films

JF - Journal of Vacuum Science and Technology A: Vacuum, Surfaces and Films

IS - 3

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Calibration of oxygen Auger signal from single-crystal ZnO surfaces

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