Capacitance spectroscopy of a-Si:H

I. Balberg*, E. Gal

*Corresponding author for this work

Research output: Contribution to journalArticlepeer-review

3 Scopus citations

Abstract

The well known capacitance-voltage technique is shown to be a useful spectroscopic tool for the determination of the state distribution in hydrogenated amorphous silicon (a-Si:H) over a substantial portion of the pseudogap. The particular utilization of this tool in the present work is for comparison between materials made by rf glow discharge and materials made by dc glow discharge decomposition of silane.

Original languageEnglish
Pages (from-to)323-326
Number of pages4
JournalJournal of Non-Crystalline Solids
Volume77-78
Issue numberPART 1
DOIs
StatePublished - 2 Dec 1985

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