TY - JOUR
T1 - Chalcogenide three-dimensional photonic structures
AU - Feigel, A.
AU - Kotler, Z.
AU - Sfez, B.
AU - Arsh, A.
AU - Klebanov, M.
AU - Lyubin, V.
PY - 2001
Y1 - 2001
N2 - AsSeTe/AsSe chalcogenide glasses are photosensitive materials (negative/positive photoresists) with large refractive index. These properties make these glasses suitable for the fabrication of photonic crystals, waveguide components and MOEMS. We present in this article fabrication of three-dimensional photonic crystal composed from AsSeTe and air, with submicron feature size. The method of fabrication is relatively simple and cheap using only vapor deposition and optical holographic lithography. The interferometric alignment allows to eliminate requirement for a mask aligner.
AB - AsSeTe/AsSe chalcogenide glasses are photosensitive materials (negative/positive photoresists) with large refractive index. These properties make these glasses suitable for the fabrication of photonic crystals, waveguide components and MOEMS. We present in this article fabrication of three-dimensional photonic crystal composed from AsSeTe and air, with submicron feature size. The method of fabrication is relatively simple and cheap using only vapor deposition and optical holographic lithography. The interferometric alignment allows to eliminate requirement for a mask aligner.
KW - Chalcogenide glasses
KW - Three-dimensional photonic crystals
UR - http://www.scopus.com/inward/record.url?scp=0034944329&partnerID=8YFLogxK
U2 - 10.1117/12.426829
DO - 10.1117/12.426829
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AN - SCOPUS:0034944329
SN - 0277-786X
VL - 4277
SP - 249
EP - 251
JO - Proceedings of SPIE - The International Society for Optical Engineering
JF - Proceedings of SPIE - The International Society for Optical Engineering
ER -