Chalcogenide three-dimensional photonic structures

AsSeTe/AsSe chalcogenide glasses are photosensitive materials (negative/positive photoresists) with large refractive index. These properties make these glasses suitable for the fabrication of photonic crystals, waveguide components and MOEMS. We present in this article fabrication of three-dimensional photonic crystal composed from AsSeTe and air, with submicron feature size. The method of fabrication is relatively simple and cheap using only vapor deposition and optical holographic lithography. The interferometric alignment allows to eliminate requirement for a mask aligner.