Channel waveguide formed by "one shot" implantation of He + ions

Har'el Ilan; Alexander Gumennik; Galina Perepelitsa; Abraham Israel; Aharon J. Agranat

doi:10.1109/CLEO.2008.4551768

Channel waveguide formed by "one shot" implantation of He ⁺ ions

Har'el Ilan^*, Alexander Gumennik, Galina Perepelitsa, Abraham Israel, Aharon J. Agranat

^*Corresponding author for this work

Department of Applied Physics

Research output: Chapter in Book/Report/Conference proceeding › Conference contribution › peer-review

Abstract

Channel waveguide was fabricated in a KLTN crystal. The waveguide was produced by a selective implantation of He⁺ ions into the crystal through a gold stopping mask, which created a trough shaped cladding.

Original language	English
Title of host publication	2008 Conference on Quantum Electronics and Laser Science Conference on Lasers and Electro-Optics, CLEO/QELS
DOIs	https://doi.org/10.1109/CLEO.2008.4551768
State	Published - 2008
Event	Conference on Quantum Electronics and Laser Science Conference on Lasers and Electro-Optics, CLEO/QELS 2008 - San Jose, CA, United States Duration: 4 May 2008 → 9 May 2008

Publication series

Name	2008 Conference on Quantum Electronics and Laser Science Conference on Lasers and Electro-Optics, CLEO/QELS

Conference

Conference	Conference on Quantum Electronics and Laser Science Conference on Lasers and Electro-Optics, CLEO/QELS 2008
Country/Territory	United States
City	San Jose, CA
Period	4/05/08 → 9/05/08

Access to Document

10.1109/CLEO.2008.4551768

Cite this

Ilan, H., Gumennik, A., Perepelitsa, G., Israel, A., & Agranat, A. J. (2008). Channel waveguide formed by "one shot" implantation of He ⁺ ions. In 2008 Conference on Quantum Electronics and Laser Science Conference on Lasers and Electro-Optics, CLEO/QELS Article 4551768 (2008 Conference on Quantum Electronics and Laser Science Conference on Lasers and Electro-Optics, CLEO/QELS). https://doi.org/10.1109/CLEO.2008.4551768

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title = "Channel waveguide formed by {"}one shot{"} implantation of He + ions",

abstract = "Channel waveguide was fabricated in a KLTN crystal. The waveguide was produced by a selective implantation of He+ ions into the crystal through a gold stopping mask, which created a trough shaped cladding.",

author = "Har'el Ilan and Alexander Gumennik and Galina Perepelitsa and Abraham Israel and Agranat, {Aharon J.}",

year = "2008",

doi = "10.1109/CLEO.2008.4551768",

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booktitle = "2008 Conference on Quantum Electronics and Laser Science Conference on Lasers and Electro-Optics, CLEO/QELS",

note = "Conference on Quantum Electronics and Laser Science Conference on Lasers and Electro-Optics, CLEO/QELS 2008 ; Conference date: 04-05-2008 Through 09-05-2008",

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Ilan, H, Gumennik, A, Perepelitsa, G, Israel, A & Agranat, AJ 2008, Channel waveguide formed by "one shot" implantation of He ⁺ ions. in 2008 Conference on Quantum Electronics and Laser Science Conference on Lasers and Electro-Optics, CLEO/QELS., 4551768, 2008 Conference on Quantum Electronics and Laser Science Conference on Lasers and Electro-Optics, CLEO/QELS, Conference on Quantum Electronics and Laser Science Conference on Lasers and Electro-Optics, CLEO/QELS 2008, San Jose, CA, United States, 4/05/08. https://doi.org/10.1109/CLEO.2008.4551768

Channel waveguide formed by "one shot" implantation of He ⁺ ions. / Ilan, Har'el; Gumennik, Alexander; Perepelitsa, Galina et al.
2008 Conference on Quantum Electronics and Laser Science Conference on Lasers and Electro-Optics, CLEO/QELS. 2008. 4551768 (2008 Conference on Quantum Electronics and Laser Science Conference on Lasers and Electro-Optics, CLEO/QELS).

Research output: Chapter in Book/Report/Conference proceeding › Conference contribution › peer-review

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AU - Israel, Abraham

AU - Agranat, Aharon J.

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AB - Channel waveguide was fabricated in a KLTN crystal. The waveguide was produced by a selective implantation of He+ ions into the crystal through a gold stopping mask, which created a trough shaped cladding.

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Ilan H, Gumennik A, Perepelitsa G, Israel A, Agranat AJ. Channel waveguide formed by "one shot" implantation of He ⁺ ions. In 2008 Conference on Quantum Electronics and Laser Science Conference on Lasers and Electro-Optics, CLEO/QELS. 2008. 4551768. (2008 Conference on Quantum Electronics and Laser Science Conference on Lasers and Electro-Optics, CLEO/QELS). doi: 10.1109/CLEO.2008.4551768