Construction of an optical wire imprinted in potassium lithium tantalate niobate by He+ implantation

Har'el Ilan*, Alexander Gumennik, Galina Perepelitsa, Abraham Israel, Aharon J. Agranat

*Corresponding author for this work

Research output: Contribution to journalArticlepeer-review

22 Scopus citations

Abstract

A channel waveguide constructed in potassium lithium tantalate niobate (KLTN) substrate by the implantation of He+ ions at 1.65 MeV is presented. The waveguide has a trapezoidal profile with a crystalline KLTN core surrounded by amorphized KLTN created by the implantation. The implantation was done through a 2 μm thick gold stopping mask with a trapezoidal groove. During the implantation, the contour of the groove was replicated beneath the surface of the substrate forming the trapezoidal cladding of the channel waveguide. The channel waveguide is designed as the interconnecting element in electro-optical integrated circuits.

Original languageAmerican English
Article number191101
JournalApplied Physics Letters
Volume92
Issue number19
DOIs
StatePublished - 2008

Bibliographical note

Funding Information:
This research was supported in part by Grant No. 2002341 from the United States-Israel Binational Science Foundation (BSF), Jerusalem, Israel.

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