A channel waveguide constructed in potassium lithium tantalate niobate (KLTN) substrate by the implantation of He+ ions at 1.65 MeV is presented. The waveguide has a trapezoidal profile with a crystalline KLTN core surrounded by amorphized KLTN created by the implantation. The implantation was done through a 2 μm thick gold stopping mask with a trapezoidal groove. During the implantation, the contour of the groove was replicated beneath the surface of the substrate forming the trapezoidal cladding of the channel waveguide. The channel waveguide is designed as the interconnecting element in electro-optical integrated circuits.
Bibliographical noteFunding Information:
This research was supported in part by Grant No. 2002341 from the United States-Israel Binational Science Foundation (BSF), Jerusalem, Israel.