A generic methodology for constructing complex integrated electro-optic circuits in waveguided configurations is presented. The method is based on combining two techniques, “laser ablation” and “refractive index engineering by ion implantations.” The constructed circuits are side-cladded by air trenches that were produced using laser ablation and bottom-cladded by a layer with a reduced refractive index which is generated through the implantation of He+ ions. This fabrication technique enables the construction of circular structures with complex geometry featuring small radii of curvature, and further can be employed to construct microfluidic channels on the same substrate. The research demonstrates waveguides in both linear and circular configurations that were constructed in a potassium lithium tantalate niobate (KLTN) substrate using the aforementioned method, proving that this substrate is a suitable candidate for use in creating laboratories-on-a-chip with multifunctional capabilities. The proposed techniques used in the research are generic and applicable to a wide range of substrates.
|Original language||American English|
|Number of pages||5|
|Journal||Applied Physics A: Materials Science and Processing|
|State||Published - Feb 2014|
Bibliographical noteFunding Information:
This work was supported in part by the Israel Science Foundation Grant No. 1519/08.
© 2014, Springer-Verlag Berlin Heidelberg.