Damage annealing process in implanted poly-silicon studied by nanocalorimetry: Effects of heating rate and beam flux

R. Karmouch, J. F. Mercure, Y. Anahory, F. Schiettekatte*

*Corresponding author for this work

Research output: Contribution to journalArticlepeer-review

2 Scopus citations


Nanocalorimetry of ion-implanted damage annealing in polycrystalline Si is presented. Si was implanted at 30 keV. Temperature scans were performed between room temperature and 350 °C at heating rates between 48 and 144 kK/s for a fluence of 1 × 1013 Si/cm2, and between room temperature and 540 °C at beam fluxes of 11 and 44 nA/cm2 with a fluence of 2 × 1013 Si/cm2. The heat release shows no features, but rather a broad increase with temperature which is characteristic of a series of processes continuously distributed in terms of activation energy. Higher heating rates shift the signal towards higher temperatures and decrease its amplitude, which is typical for thermally activated processes. Lower beam flux implants translate into smaller heat release. This is partly attributed to shorter implantation times at higher fluxes, which leave less time for dynamic annealing, but could also be due to the higher impact rate in the environment of previously generated disordered zones. Such impact generates damage that may stabilize disordered zones, which would have enough time to undergo dynamic annealing at lower fluxes.

Original languageAmerican English
Pages (from-to)341-345
Number of pages5
JournalNuclear Instruments and Methods in Physics Research, Section B: Beam Interactions with Materials and Atoms
Issue number1-4
StatePublished - Dec 2005
Externally publishedYes

Bibliographical note

Funding Information:
The authors are grateful to S. Roorda and M. Chicoine (Université de Montréal), and L.H. Allen and M.Yu. Efremov (UIUC) for fruitful discussions. Thanks also go to Y.Q. Wang for TEM, L. Godbout, R. Gosselin for their technical assistance with the accelerator operation, and M. Skvarla and P. Infante of the Cornell Nanofabrication Facility, as well as M.-H. Bernier and S. Bah of the École Polytechnique de Montréal for their assistance with nanocalorimeters fabrication. This work benefited from the financial support of NanoQuébec, the Fonds Québécois de Recherche sur la Nature et les Technologies and the Natural Science and Engineering Research Council of Canada.


  • Beam flux
  • Damage annealing
  • Heat rate
  • Ion implantation
  • Nanocalorimetry


Dive into the research topics of 'Damage annealing process in implanted poly-silicon studied by nanocalorimetry: Effects of heating rate and beam flux'. Together they form a unique fingerprint.

Cite this