Damage evolution in low-energy ion implanted silicon
- R. Karmouch
- , Y. Anahory
- , J. F. Mercure
- , D. Bouilly
- , M. Chicoine
- , G. Bentoumi
- , R. Leonelli
- , Y. Q. Wang
- , F. Schiettekatte*
*Corresponding author for this work
Research output: Contribution to journal › Article › peer-review
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