Design, fabrication, and characterization of circular Dammann gratings based on grayscale lithography

Uriel Levy*, Boris Desiatov, Ilya Goykhman, Tali Nachmias, Avi Ohayon, Sheffer E. Meltzer

*Corresponding author for this work

Research output: Contribution to journalArticlepeer-review

21 Scopus citations

Abstract

We describe the design, fabrication, and experimental demonstration of a circular Dammann grating element generating a point-spread function of two concentric rings with equal intensity. The element was fabricated using grayscale lithography, providing a smooth and accurate phase profile. As a result, we obtained high diffraction efficiency and good uniformity between the two rings.

Original languageAmerican English
Pages (from-to)880-882
Number of pages3
JournalOptics Letters
Volume35
Issue number6
DOIs
StatePublished - 15 Mar 2010

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