Design optimization and experimental demonstration of low VπL carrier-depletion silicon mach-zehnder modulator

Ilya Goykhman*, Boris Desiatov, Shalva Ben-Ezra, Joseph Shappir, Uriel Levy

*Corresponding author for this work

Research output: Chapter in Book/Report/Conference proceedingConference contributionpeer-review

Abstract

We design, optimize and demonstrate a highly efficient carrier-depletion silicon Mach-Zehnder modulator with very low VπL of ~0.2Vcm. Design consideration, fabrication process and experimental results will be presented.

Original languageAmerican English
Title of host publicationCLEO
Subtitle of host publicationScience and Innovations, CLEO_SI 2013
PagesCTu2F.4
StatePublished - 2013
EventCLEO: Science and Innovations, CLEO_SI 2013 - San Jose, CA, United States
Duration: 9 Jun 201314 Jun 2013

Publication series

NameCLEO: Science and Innovations, CLEO_SI 2013

Conference

ConferenceCLEO: Science and Innovations, CLEO_SI 2013
Country/TerritoryUnited States
CitySan Jose, CA
Period9/06/1314/06/13

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