Abstract
We design, optimize and demonstrate a highly efficient carrier-depletion silicon Mach-Zehnder modulator with very low VπL of ~0.2Vcm. Design consideration, fabrication process and experimental results will be presented.
Original language | English |
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Title of host publication | CLEO |
Subtitle of host publication | Science and Innovations, CLEO_SI 2013 |
Pages | CTu2F.4 |
State | Published - 2013 |
Event | CLEO: Science and Innovations, CLEO_SI 2013 - San Jose, CA, United States Duration: 9 Jun 2013 → 14 Jun 2013 |
Publication series
Name | CLEO: Science and Innovations, CLEO_SI 2013 |
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Conference
Conference | CLEO: Science and Innovations, CLEO_SI 2013 |
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Country/Territory | United States |
City | San Jose, CA |
Period | 9/06/13 → 14/06/13 |