Dominant formation and quenching processes in E-beam pumped ArF and KrF lasers

The dominant formation and quenching processes in E-beam pumped ArF* and KrF* lasers are discussed. The quenching of ArF* by F2 and Ar has been measured by analyzing the ArF* (B 122X 122) fluorescence as a function of the F2 and Ar partial pressures. We have also measured the displacement of the Ar in ArF* by Kr to form KrF*. The dominant quenching processes of KrF* were identified, and the rate constants were measured. The ArF* and KrF* are formed from the ionic states with high efficiency. Interception of the precursors can be made negligible by choosing the experimental conditions properly. The quenching of KrF* by Ar and Kr is mainly a three-body process resulting in the formation of Kr2F*. The emission from Kr2F* was observed in a broadband centered at 410 nm. We have verified that the Kr2F* is produced subsequent to the KrF* formation by performing a laser saturation experiment.