@inproceedings{28d2f2cfca4f40978498aa632ebd54e0,
title = "Effects of helium dilution on glow discharge depositions of a-Si1-xGex:H alloys",
abstract = "A study is made of the effects of helium feed gas dilution on the properties of a-Si1-xGex:H alloys deposited using radio-frequency glow discharge decomposition of silane and germane gas mixtures. Comparing a-Si1-xGex:H films deposited using 65% helium dilution with films deposited using 65% hydrogen dilution, it is found that films deposited with helium dilution have a longer charge carrier diffusion length and higher quantum efficiency-mobility-lifetime product values. It is also found that the incorporation of Ge atoms in the a-Si1-xGex:H film is more efficient with helium dilution than with hydrogen dilution.",
author = "Tsuo, {Y. S.} and Y. Xu and I. Balberg and Crandall, {Richard S.}",
year = "1992",
language = "אנגלית",
isbn = "0879426365",
series = "Conference Record of the IEEE Photovoltaic Specialists Conference",
publisher = "Publ by IEEE",
pages = "1334--1337",
booktitle = "Conference Record of the IEEE Photovoltaic Specialists Conference",
note = "Conference Record of the Twenty-Second IEEE Photovoltaic Specialists Conference - 1991 ; Conference date: 07-10-1991 Through 11-10-1991",
}