Effects produced by metal-coated near-field probes on the performance of silicon waveguides and resonators

We study the effects of metal-coated fiber near-field probes on the performance of nanophotonic devices. Employing a heterodyne near-field scanning optical microscope and analyzing transmission characteristics, we find that a metal-coated probe can typically introduce a 3 dB intensity loss and a 0.2 rad phase shift during characterization of a straight waveguide made in a silicon-on-insulator system. In resonant nanophotonic structures such as a 5 μm radius microring resonator, we demonstrate that the probe induces a 1 nm shift in resonant wavelength and decreases the resonator quality factor, Q, from 1100 to 480.