Electrical behavior of Si/SiO2 nanocomposite films

V. Iancu, L. Jdira, M. Draghic, M. R. Mitroi, I. Balberg, M. L. Ciurea*

*Corresponding author for this work

Research output: Chapter in Book/Report/Conference proceedingConference contributionpeer-review

2 Scopus citations

Abstract

Electrical behavior of Si/SiO2 nanocomposite films is studied. The samples preparation is presented. Current-voltage and current-temperature characteristics are analyzed in the frame of a conduction model. The agreement between the experimental data and the fit is excellent.

Original languageEnglish
Title of host publication2003 26th International Semiconductor Conference, CAS 2003, Proceedings
PublisherInstitute of Electrical and Electronics Engineers Inc.
Pages83-86
Number of pages4
ISBN (Electronic)0780378210
DOIs
StatePublished - 2003
Event26th International Semiconductor Conference, CAS 2003 - Sinaia, Romania
Duration: 28 Sep 20032 Oct 2003

Publication series

NameProceedings of the International Semiconductor Conference, CAS
Volume1

Conference

Conference26th International Semiconductor Conference, CAS 2003
Country/TerritoryRomania
CitySinaia
Period28/09/032/10/03

Bibliographical note

Publisher Copyright:
© 2001 IEEE.

Keywords

  • Annealing
  • Atmosphere
  • Conducting materials
  • Physics
  • Potential well
  • Semiconductor films
  • Silicon
  • Sputtering
  • Substrates
  • Tunneling

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