Abstract
Electrical behavior of Si/SiO2 nanocomposite films is studied. The samples preparation is presented. Current-voltage and current-temperature characteristics are analyzed in the frame of a conduction model. The agreement between the experimental data and the fit is excellent.
Original language | English |
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Title of host publication | 2003 26th International Semiconductor Conference, CAS 2003, Proceedings |
Publisher | Institute of Electrical and Electronics Engineers Inc. |
Pages | 83-86 |
Number of pages | 4 |
ISBN (Electronic) | 0780378210 |
DOIs | |
State | Published - 2003 |
Event | 26th International Semiconductor Conference, CAS 2003 - Sinaia, Romania Duration: 28 Sep 2003 → 2 Oct 2003 |
Publication series
Name | Proceedings of the International Semiconductor Conference, CAS |
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Volume | 1 |
Conference
Conference | 26th International Semiconductor Conference, CAS 2003 |
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Country/Territory | Romania |
City | Sinaia |
Period | 28/09/03 → 2/10/03 |
Bibliographical note
Publisher Copyright:© 2001 IEEE.
Keywords
- Annealing
- Atmosphere
- Conducting materials
- Physics
- Potential well
- Semiconductor films
- Silicon
- Sputtering
- Substrates
- Tunneling