Energetic ion irradiation as advanced process for functionalization of silicon nanocrystals in a SiO ₂ matrix

A physical picture of swift heavy ion irradiation effects on ensembles of silicon nanocrystallites (NCs) embedded in a dielectric SiO ₂ matrix is given following our study of the experimental investigation of structural, electrical and photoluminescence properties of that system We found that ion irradiation can drastically change the structure of the layer by forming an ordered NC chains along the ion tracks in the 400-1000 nm thick layer. The ion energy and dose are then the main tools for functionalization of our system, from changing the size and the concentration of the NCs, to managing the optical and electrical properties.