Fabrication and characterization of a multichannel 3D thermopile for chip calorimeter applications

Tho Phuoc Huynh, Yilei Zhang*, Cohen Yehuda

*Corresponding author for this work

Research output: Contribution to journalArticlepeer-review

15 Scopus citations

Abstract

Thermal sensors based on thermopiles are some of the most robust and popular temperature sensing technologies across industries and research disciplines. A chip calorimeter with a 3D thermopile layout with a large sensing area and multichannel capacity has been developed, which is highly desired for many applications requiring large reaction chambers or high throughputs, such as biofilm research, drug screening, etc. The performance of the device, including temperature sensitivity and heat power sensitivity, was evaluated. The capability to split the chip calorimeter to multiple channels was also demonstrated, which makes the chip calorimeter very flexible and powerful in many applications.

Original languageEnglish
Pages (from-to)3351-3361
Number of pages11
JournalSensors
Volume15
Issue number2
DOIs
StatePublished - 3 Feb 2015
Externally publishedYes

Bibliographical note

Publisher Copyright:
© 2015 by the authors; licensee MDPI, Basel, Switzerland.

Keywords

  • 3D thermopile
  • Chip calorimeter
  • Microfabrication

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