Formation and quenching kinetics of ArF

M. Rokni*, J. H. Jacob, J. A. Mangano, R. Brochu

*Corresponding author for this work

Research output: Contribution to journalArticlepeer-review

46 Scopus citations

Abstract

In this paper we report on the formation and quenching kinetics of ArF* (2Σ1/2). The ArF* is produced by irradiating mixtures of Ar and F2. The primary formation channel is via the recombination of Ar+ and Ar+2 with F-. Quenching of ArF* by F2 and Ar have been measured by analyzing the ArF* 2Σ1/22Σ1/2 fluorescence as a function of the F 2 and Ar partial pressures. We have also measured the displacement of the Ar in ArF* by Kr and Xe to form KrF* and XeF*, respectively.

Original languageEnglish
Pages (from-to)79-82
Number of pages4
JournalApplied Physics Letters
Volume31
Issue number2
DOIs
StatePublished - 1977
Externally publishedYes

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