Formation and quenching kinetics of ArF

M. Rokni; J. H. Jacob; J. A. Mangano; R. Brochu

doi:10.1063/1.89597

Formation and quenching kinetics of ArF

M. Rokni^*
, J. H. Jacob
, J. A. Mangano
, R. Brochu

^*Corresponding author for this work

Research output: Contribution to journal › Article › peer-review

46 Scopus citations

Abstract

In this paper we report on the formation and quenching kinetics of ArF* (²Σ_1/2). The ArF* is produced by irradiating mixtures of Ar and F₂. The primary formation channel is via the recombination of Ar⁺ and Ar⁺₂ with F^-. Quenching of ArF* by F₂ and Ar have been measured by analyzing the ArF* ²Σ_1/2→ ²Σ_1/2 fluorescence as a function of the F ₂ and Ar partial pressures. We have also measured the displacement of the Ar in ArF* by Kr and Xe to form KrF* and XeF*, respectively.

Original language	English
Pages (from-to)	79-82
Number of pages	4
Journal	Applied Physics Letters
Volume	31
Issue number	2
DOIs	https://doi.org/10.1063/1.89597
State	Published - 1977
Externally published	Yes

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title = "Formation and quenching kinetics of ArF",

abstract = "In this paper we report on the formation and quenching kinetics of ArF* (2Σ1/2). The ArF* is produced by irradiating mixtures of Ar and F2. The primary formation channel is via the recombination of Ar+ and Ar+2 with F-. Quenching of ArF* by F2 and Ar have been measured by analyzing the ArF* 2Σ1/2→ 2Σ1/2 fluorescence as a function of the F 2 and Ar partial pressures. We have also measured the displacement of the Ar in ArF* by Kr and Xe to form KrF* and XeF*, respectively.",

author = "M. Rokni and Jacob, \{J. H.\} and Mangano, \{J. A.\} and R. Brochu",

year = "1977",

doi = "10.1063/1.89597",

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journal = "Applied Physics Letters",

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publisher = "American Institute of Physics",

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T1 - Formation and quenching kinetics of ArF

AU - Rokni, M.

AU - Jacob, J. H.

AU - Mangano, J. A.

AU - Brochu, R.

PY - 1977

Y1 - 1977

N2 - In this paper we report on the formation and quenching kinetics of ArF* (2Σ1/2). The ArF* is produced by irradiating mixtures of Ar and F2. The primary formation channel is via the recombination of Ar+ and Ar+2 with F-. Quenching of ArF* by F2 and Ar have been measured by analyzing the ArF* 2Σ1/2→ 2Σ1/2 fluorescence as a function of the F 2 and Ar partial pressures. We have also measured the displacement of the Ar in ArF* by Kr and Xe to form KrF* and XeF*, respectively.

AB - In this paper we report on the formation and quenching kinetics of ArF* (2Σ1/2). The ArF* is produced by irradiating mixtures of Ar and F2. The primary formation channel is via the recombination of Ar+ and Ar+2 with F-. Quenching of ArF* by F2 and Ar have been measured by analyzing the ArF* 2Σ1/2→ 2Σ1/2 fluorescence as a function of the F 2 and Ar partial pressures. We have also measured the displacement of the Ar in ArF* by Kr and Xe to form KrF* and XeF*, respectively.

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DO - 10.1063/1.89597

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SN - 0003-6951

VL - 31

SP - 79

EP - 82

JO - Applied Physics Letters

JF - Applied Physics Letters

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ER -

Formation and quenching kinetics of ArF

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