Fringe-field-activated SOI tilting mirrors

D. S. Greywall; Chien Shing Pai; Sang Hyun Oh; Chorng Ping Chang; D. M. Marom; S. Stanton; P. A. Busch; R. A. Cirelli; J. A. Taylor; F. P. Klemens; T. W. Sorsch; J. E. Bower; W. Y.C. Lai; H. T. Soh

doi:10.1109/OMEMS.2003.1233482

Fringe-field-activated SOI tilting mirrors

D. S. Greywall, Chien Shing Pai, Sang Hyun Oh, Chorng Ping Chang, D. M. Marom, S. Stanton, P. A. Busch, R. A. Cirelli, J. A. Taylor, F. P. Klemens, T. W. Sorsch, J. E. Bower, W. Y.C. Lai, H. T. Soh

Research output: Chapter in Book/Report/Conference proceeding › Conference contribution › peer-review

Abstract

This paper discusses a significant improvement of the SOI process that can be implemented in various manners and that remedies many problems of earlier fabrication schemes. In particular the new MOEMS structures are monolithic, do not exhibit rotational snapdown, have electrical shielding between channels, and have activation voltages less than or comparable to parallel plate devices. The approach is discussed in terms of an application requiring a linear array of closely-spaced cantilever mirrors.

Original language	English
Title of host publication	2003 IEEE/LEOS International Conference on Optical MEMS
Publisher	Institute of Electrical and Electronics Engineers Inc.
Pages	91-92
Number of pages	2
ISBN (Electronic)	078037830X, 9780780378308
DOIs	https://doi.org/10.1109/OMEMS.2003.1233482
State	Published - 2003
Externally published	Yes
Event	2003 IEEE/LEOS International Conference on Optical MEMS - Waikoloa, United States Duration: 18 Aug 2003 → 21 Aug 2003

Publication series

Name	2003 IEEE/LEOS International Conference on Optical MEMS

Conference

Conference	2003 IEEE/LEOS International Conference on Optical MEMS
Country/Territory	United States
City	Waikoloa
Period	18/08/03 → 21/08/03

Bibliographical note

Publisher Copyright:
© 2003 IEEE.

Keywords

Dielectric substrates
Electrodes
Electrostatics
Etching
Micromechanical devices
Mirrors
Research and development
Silicon
Springs
Voltage

Access to Document

10.1109/OMEMS.2003.1233482

Cite this

Greywall, D. S., Pai, C. S., Oh, S. H., Chang, C. P., Marom, D. M., Stanton, S., Busch, P. A., Cirelli, R. A., Taylor, J. A., Klemens, F. P., Sorsch, T. W., Bower, J. E., Lai, W. Y. C., & Soh, H. T. (2003). Fringe-field-activated SOI tilting mirrors. In 2003 IEEE/LEOS International Conference on Optical MEMS (pp. 91-92). Article 1233482 (2003 IEEE/LEOS International Conference on Optical MEMS). Institute of Electrical and Electronics Engineers Inc.. https://doi.org/10.1109/OMEMS.2003.1233482

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title = "Fringe-field-activated SOI tilting mirrors",

abstract = "This paper discusses a significant improvement of the SOI process that can be implemented in various manners and that remedies many problems of earlier fabrication schemes. In particular the new MOEMS structures are monolithic, do not exhibit rotational snapdown, have electrical shielding between channels, and have activation voltages less than or comparable to parallel plate devices. The approach is discussed in terms of an application requiring a linear array of closely-spaced cantilever mirrors.",

keywords = "Dielectric substrates, Electrodes, Electrostatics, Etching, Micromechanical devices, Mirrors, Research and development, Silicon, Springs, Voltage",

author = "Greywall, {D. S.} and Pai, {Chien Shing} and Oh, {Sang Hyun} and Chang, {Chorng Ping} and Marom, {D. M.} and S. Stanton and Busch, {P. A.} and Cirelli, {R. A.} and Taylor, {J. A.} and Klemens, {F. P.} and Sorsch, {T. W.} and Bower, {J. E.} and Lai, {W. Y.C.} and Soh, {H. T.}",

note = "Publisher Copyright: {\textcopyright} 2003 IEEE.; 2003 IEEE/LEOS International Conference on Optical MEMS ; Conference date: 18-08-2003 Through 21-08-2003",

year = "2003",

doi = "10.1109/OMEMS.2003.1233482",

language = "אנגלית",

series = "2003 IEEE/LEOS International Conference on Optical MEMS",

publisher = "Institute of Electrical and Electronics Engineers Inc.",

pages = "91--92",

booktitle = "2003 IEEE/LEOS International Conference on Optical MEMS",

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Greywall, DS, Pai, CS, Oh, SH, Chang, CP, Marom, DM, Stanton, S, Busch, PA, Cirelli, RA, Taylor, JA, Klemens, FP, Sorsch, TW, Bower, JE, Lai, WYC & Soh, HT 2003, Fringe-field-activated SOI tilting mirrors. in 2003 IEEE/LEOS International Conference on Optical MEMS., 1233482, 2003 IEEE/LEOS International Conference on Optical MEMS, Institute of Electrical and Electronics Engineers Inc., pp. 91-92, 2003 IEEE/LEOS International Conference on Optical MEMS, Waikoloa, United States, 18/08/03. https://doi.org/10.1109/OMEMS.2003.1233482

Fringe-field-activated SOI tilting mirrors. / Greywall, D. S.; Pai, Chien Shing; Oh, Sang Hyun et al.
2003 IEEE/LEOS International Conference on Optical MEMS. Institute of Electrical and Electronics Engineers Inc., 2003. p. 91-92 1233482 (2003 IEEE/LEOS International Conference on Optical MEMS).

Research output: Chapter in Book/Report/Conference proceeding › Conference contribution › peer-review

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Fringe-field-activated SOI tilting mirrors

Abstract

Publication series

Conference

Bibliographical note

Keywords

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