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Fringe-field-activated SOI tilting mirrors
D. S. Greywall, Chien Shing Pai, Sang Hyun Oh, Chorng Ping Chang, D. M. Marom, S. Stanton, P. A. Busch, R. A. Cirelli, J. A. Taylor, F. P. Klemens, T. W. Sorsch, J. E. Bower, W. Y.C. Lai, H. T. Soh
Research output: Chapter in Book/Report/Conference proceeding › Conference contribution › peer-review