Abstract
Generation of 10-mm-long homogeneous plasmas with densities above 10 20 cm-3 is reported. The plasma parameters are simply controlled by varying the discharge voltage. High homogeneity was achieved by using a long rectangular expansion channel made out of a high thermal conductivity alloy.
Original language | English |
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Pages (from-to) | 3542-3544 |
Number of pages | 3 |
Journal | Applied Physics Letters |
Volume | 64 |
Issue number | 26 |
DOIs | |
State | Published - 1994 |