Abstract
Generation of 10-mm-long homogeneous plasmas with densities above 10 20 cm-3 is reported. The plasma parameters are simply controlled by varying the discharge voltage. High homogeneity was achieved by using a long rectangular expansion channel made out of a high thermal conductivity alloy.
| Original language | English |
|---|---|
| Pages (from-to) | 3542-3544 |
| Number of pages | 3 |
| Journal | Applied Physics Letters |
| Volume | 64 |
| Issue number | 26 |
| DOIs | |
| State | Published - 1994 |