Abstract
We demonstrate a reflection-mode eddy-current technique operating in the 100 MHz to 5 GHz range. It allows contactless measurement of the thickness of conducting layers (Ag, Al, Cu, W, etc.) 0.1-1 μm thick with the spatial resolution of 1-2 mm.
Original language | English |
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Pages (from-to) | 1634-1636 |
Number of pages | 3 |
Journal | Applied Physics Letters |
Volume | 78 |
Issue number | 11 |
DOIs | |
State | Published - 12 Mar 2001 |