High-frequency eddy-current technique for thickness measurement of micron-thick conducting layers

F. Sakran*, M. Golosovsky, H. Goldberger, D. Davidov, A. Frenkel

*Corresponding author for this work

Research output: Contribution to journalArticlepeer-review

26 Scopus citations

Abstract

We demonstrate a reflection-mode eddy-current technique operating in the 100 MHz to 5 GHz range. It allows contactless measurement of the thickness of conducting layers (Ag, Al, Cu, W, etc.) 0.1-1 μm thick with the spatial resolution of 1-2 mm.

Original languageEnglish
Pages (from-to)1634-1636
Number of pages3
JournalApplied Physics Letters
Volume78
Issue number11
DOIs
StatePublished - 12 Mar 2001

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