High-frequency eddy-current technique for thickness measurement of micron-thick conducting layers

F. Sakran; M. Golosovsky; H. Goldberger; D. Davidov; A. Frenkel

doi:10.1063/1.1355298

High-frequency eddy-current technique for thickness measurement of micron-thick conducting layers

F. Sakran^*
, M. Golosovsky
, H. Goldberger
, D. Davidov
, A. Frenkel

^*Corresponding author for this work

Racah Institute of Physics

Research output: Contribution to journal › Article › peer-review

26 Scopus citations

Abstract

We demonstrate a reflection-mode eddy-current technique operating in the 100 MHz to 5 GHz range. It allows contactless measurement of the thickness of conducting layers (Ag, Al, Cu, W, etc.) 0.1-1 μm thick with the spatial resolution of 1-2 mm.

Original language	English
Pages (from-to)	1634-1636
Number of pages	3
Journal	Applied Physics Letters
Volume	78
Issue number	11
DOIs	https://doi.org/10.1063/1.1355298
State	Published - 12 Mar 2001

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title = "High-frequency eddy-current technique for thickness measurement of micron-thick conducting layers",

abstract = "We demonstrate a reflection-mode eddy-current technique operating in the 100 MHz to 5 GHz range. It allows contactless measurement of the thickness of conducting layers (Ag, Al, Cu, W, etc.) 0.1-1 μm thick with the spatial resolution of 1-2 mm.",

author = "F. Sakran and M. Golosovsky and H. Goldberger and D. Davidov and A. Frenkel",

year = "2001",

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AU - Sakran, F.

AU - Golosovsky, M.

AU - Goldberger, H.

AU - Davidov, D.

AU - Frenkel, A.

PY - 2001/3/12

Y1 - 2001/3/12

N2 - We demonstrate a reflection-mode eddy-current technique operating in the 100 MHz to 5 GHz range. It allows contactless measurement of the thickness of conducting layers (Ag, Al, Cu, W, etc.) 0.1-1 μm thick with the spatial resolution of 1-2 mm.

AB - We demonstrate a reflection-mode eddy-current technique operating in the 100 MHz to 5 GHz range. It allows contactless measurement of the thickness of conducting layers (Ag, Al, Cu, W, etc.) 0.1-1 μm thick with the spatial resolution of 1-2 mm.

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JO - Applied Physics Letters

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High-frequency eddy-current technique for thickness measurement of micron-thick conducting layers

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