High Q-factor microring resonator using local oxidation of silicon (LOCOS) and adiabatic geometry

Jinan Nijem; Alex Naiman; Roy Zektzer; Christian Frydendahl; Noa Mazurski; Uriel Levy

High Q-factor microring resonator using local oxidation of silicon (LOCOS) and adiabatic geometry

Jinan Nijem, Alex Naiman, Roy Zektzer, Christian Frydendahl, Noa Mazurski, Uriel Levy^*

^*Corresponding author for this work

Department of Applied Physics

Research output: Contribution to journal › Conference article › peer-review

Abstract

A single mode adiabatic microring resonator fabricated using local oxidation of silicon technique (LOCOS) is proposed and demonstrated. An ultrahigh loaded Q-factor of ~1 Million with a free spectral range of 2nm is achieved.

Original language	English
Article number	JTh3A.77
Journal	Optics InfoBase Conference Papers
State	Published - 2021
Event	CLEO: QELS_Fundamental Science, CLEO: QELS 2021 - Part of Conference on Lasers and Electro-Optics, CLEO 2021 - Virtual, Online, United States Duration: 9 May 2021 → 14 May 2021

Bibliographical note

Publisher Copyright:
© OSA 2021, © 2021 The Author(s)

Cite this

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title = "High Q-factor microring resonator using local oxidation of silicon (LOCOS) and adiabatic geometry",

abstract = "A single mode adiabatic microring resonator fabricated using local oxidation of silicon technique (LOCOS) is proposed and demonstrated. An ultrahigh loaded Q-factor of ~1 Million with a free spectral range of 2nm is achieved.",

author = "Jinan Nijem and Alex Naiman and Roy Zektzer and Christian Frydendahl and Noa Mazurski and Uriel Levy",

note = "Publisher Copyright: {\textcopyright} OSA 2021, {\textcopyright} 2021 The Author(s); CLEO: QELS_Fundamental Science, CLEO: QELS 2021 - Part of Conference on Lasers and Electro-Optics, CLEO 2021 ; Conference date: 09-05-2021 Through 14-05-2021",

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language = "אנגלית",

journal = "Optics InfoBase Conference Papers",

issn = "2162-2701",

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T1 - High Q-factor microring resonator using local oxidation of silicon (LOCOS) and adiabatic geometry

AU - Nijem, Jinan

AU - Naiman, Alex

AU - Zektzer, Roy

AU - Frydendahl, Christian

AU - Mazurski, Noa

AU - Levy, Uriel

PY - 2021

Y1 - 2021

N2 - A single mode adiabatic microring resonator fabricated using local oxidation of silicon technique (LOCOS) is proposed and demonstrated. An ultrahigh loaded Q-factor of ~1 Million with a free spectral range of 2nm is achieved.

AB - A single mode adiabatic microring resonator fabricated using local oxidation of silicon technique (LOCOS) is proposed and demonstrated. An ultrahigh loaded Q-factor of ~1 Million with a free spectral range of 2nm is achieved.

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AN - SCOPUS:85119449829

SN - 2162-2701

JO - Optics InfoBase Conference Papers

JF - Optics InfoBase Conference Papers

M1 - JTh3A.77

T2 - CLEO: QELS_Fundamental Science, CLEO: QELS 2021 - Part of Conference on Lasers and Electro-Optics, CLEO 2021

Y2 - 9 May 2021 through 14 May 2021

ER -

High Q-factor microring resonator using local oxidation of silicon (LOCOS) and adiabatic geometry

Abstract

Bibliographical note

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