High Q-factor microring resonator using local oxidation of silicon (LOCOS) and adiabatic geometry

Jinan Nijem, Alex Naiman, Roy Zektzer, Christian Frydendahl, Noa Mazurski, Uriel Levy*

*Corresponding author for this work

Research output: Contribution to journalConference articlepeer-review

Abstract

A single mode adiabatic microring resonator fabricated using local oxidation of silicon technique (LOCOS) is proposed and demonstrated. An ultrahigh loaded Q-factor of ~1 Million with a free spectral range of 2nm is achieved.

Original languageAmerican English
Article numberJTh3A.77
JournalOptics InfoBase Conference Papers
StatePublished - 2021
EventCLEO: QELS_Fundamental Science, CLEO: QELS 2021 - Part of Conference on Lasers and Electro-Optics, CLEO 2021 - Virtual, Online, United States
Duration: 9 May 202114 May 2021

Bibliographical note

Publisher Copyright:
© OSA 2021, © 2021 The Author(s)

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