High Q-factor microring resonator using local oxidation of silicon (LOCOS) and adiabatic geometry

Jinan Nijem, Alex Naiman, Roy Zektzer, Christian Frydendahl, Noa Mazurski, Uriel Levy

Research output: Chapter in Book/Report/Conference proceedingConference contributionpeer-review

1 Scopus citations

Abstract

A single mode adiabatic microring resonator fabricated using local oxidation of silicon technique (LOCOS) is proposed and demonstrated. An ultrahigh loaded Q-factor of ~1 Million with a free spectral range of 2nm is achieved.

Original languageEnglish
Title of host publication2021 Conference on Lasers and Electro-Optics, CLEO 2021 - Proceedings
PublisherInstitute of Electrical and Electronics Engineers Inc.
ISBN (Electronic)9781943580910
StatePublished - May 2021
Event2021 Conference on Lasers and Electro-Optics, CLEO 2021 - Virtual, Online, United States
Duration: 9 May 202114 May 2021

Publication series

Name2021 Conference on Lasers and Electro-Optics, CLEO 2021 - Proceedings

Conference

Conference2021 Conference on Lasers and Electro-Optics, CLEO 2021
Country/TerritoryUnited States
CityVirtual, Online
Period9/05/2114/05/21

Bibliographical note

Publisher Copyright:
© 2021 OSA.

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