High Resolution Etching of Semiconductors by the Feedback Mode of the Scanning Electrochemical Microscope

Keyphrases

• High-resolution 100%
• Ultramicroelectrode 100%
• Semiconductors 100%
• Feedback Type 100%
• Scanning Electrochemical Microscope 100%
• In Situ 33%
• Size-and-shape 33%
• Etching Process 33%
• Bromine 33%
• Redox Couple 33%
• Electrogenerated 33%
• Etchant 33%
• Cadmium Telluride 33%
• III-V 33%
• II-VI Semiconductors 33%
• Strong Oxidants 33%
• Gallium Phosphide 33%
• Mercury Cadmium Telluride 33%
• Semi-insulating Gallium Arsenide (SI-GaAs) 33%

Material Science

• Cadmium 100%
• Gallium Arsenide 50%
• Oxidant 50%
• Gallium 50%
• II-VI Semiconductor 50%
• Surface (Surface Science) 50%

Chemical Engineering

• Cadmium Telluride 100%
• Gallium Phosphide 50%
• Gallium Arsenide 50%