Imaging Off-Resonance Nanomechanical Motion as Modal Superposition

Joshoua Condicion Esmenda*, Myrron Albert Callera Aguila, Jyh Yang Wang, Teik Hui Lee, Chi Yuan Yang, Kung Hsuan Lin, Kuei Shu Chang-Liao, Nadav Katz, Sergey Kafanov, Yuri A. Pashkin, Chii Dong Chen*

*Corresponding author for this work

Research output: Contribution to journalArticlepeer-review

1 Scopus citations

Abstract

Observation of resonance modes is the most straightforward way of studying mechanical oscillations because these modes have maximum response to stimuli. However, a deeper understanding of mechanical motion can be obtained by also looking at modal responses at frequencies in between resonances. Here, an imaging of the modal responses for a nanomechanical drum driven off resonance is presented. By using the frequency modal analysis, these shapes are described as a superposition of resonance modes. It is found that the spatial distribution of the oscillating component of the driving force, which is affected by both the shape of the actuating electrode and inherent device properties such as asymmetry and initial slack, greatly influences the modal weight or participation. This modal superposition analysis elucidates the dynamics of any nanomechanical system through modal weights. This aids in optimizing mode-specific designs for force sensing and integration with other systems.

Original languageAmerican English
Article number2005041
JournalAdvanced Science
Volume8
Issue number13
DOIs
StatePublished - 7 Jul 2021

Bibliographical note

Funding Information:
J.C.E. and M.A.C.A. contributed equally to this work. The authors acknowledge the contributions of Tzu‐Hui Hsu and Wen‐Hao Chang in the fabrication of the devices and building the experimental setup. The authors also thank Bo‐Ru Guo and Yen‐Chun Chen for their technical assistance. They also thank the Taiwan International Graduate Program for the financial support. This project is funded by Academia Sinica Grand Challenge Seed Program (AS‐GC‐109‐08), Ministry of Science and Technology (MOST) of Taiwan (107‐2112‐M‐001‐001‐MY3), Cost Share Programme (107‐2911‐I‐001‐511), the Royal Society International Exchanges Scheme (grant IES\R3\170029), and iMATE (2391‐107‐3001). The authors would also like to extend our gratitude for the Academia Sinica Nanocore facility.

Funding Information:
J.C.E. and M.A.C.A. contributed equally to this work. The authors acknowledge the contributions of Tzu-Hui Hsu and Wen-Hao Chang in the fabrication of the devices and building the experimental setup. The authors also thank Bo-Ru Guo and Yen-Chun Chen for their technical assistance. They also thank the Taiwan International Graduate Program for the financial support. This project is funded by Academia Sinica Grand Challenge Seed Program (AS-GC-109-08), Ministry of Science and Technology (MOST) of Taiwan (107-2112-M-001-001-MY3), Cost Share Programme (107-2911-I-001-511), the Royal Society International Exchanges Scheme (grant IES\R3\170029), and iMATE (2391-107-3001). The authors would also like to extend our?gratitude for the Academia Sinica Nanocore?facility.

Publisher Copyright:
© 2021 The Authors. Advanced Science published by Wiley-VCH GmbH

Keywords

  • modal superposition
  • nanomechanical motion
  • off-resonance

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