Integrated amorphous silicon-aluminum Long-Range Surface Plasmon Polaritons (LR-SPP) waveguides

Boaz Sturlesi*, Meir Grajower, Noa Mazurski, Uriel Levy

*Corresponding author for this work

Research output: Chapter in Book/Report/Conference proceedingConference contributionpeer-review

Abstract

We demonstrate Long Range Surface Plasmon Polaritons waveguide with aluminum embedded in amorphous silicon. It operates in the telecom band and is compatible with backend CMOS process. Transmission and near field measurement results are reported.

Original languageAmerican English
Title of host publicationCLEO
Subtitle of host publicationScience and Innovations, CLEO_SI 2018
PublisherOptica Publishing Group (formerly OSA)
ISBN (Print)9781943580422
DOIs
StatePublished - 2018
EventCLEO: Science and Innovations, CLEO_SI 2018 - San Jose, United States
Duration: 13 May 201818 May 2018

Publication series

NameOptics InfoBase Conference Papers
VolumePart F94-CLEO_SI 2018
ISSN (Electronic)2162-2701

Conference

ConferenceCLEO: Science and Innovations, CLEO_SI 2018
Country/TerritoryUnited States
CitySan Jose
Period13/05/1818/05/18

Bibliographical note

Publisher Copyright:
© OSA 2018.

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