Abstract
We demonstrate Long Range Surface Plasmon Polaritons waveguide with aluminum embedded in amorphous silicon. It operates in the telecom band and is compatible with backend CMOS process. Transmission and near field measurement results are reported.
Original language | American English |
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Title of host publication | CLEO |
Subtitle of host publication | Science and Innovations, CLEO_SI 2018 |
Publisher | Optica Publishing Group (formerly OSA) |
ISBN (Print) | 9781943580422 |
DOIs | |
State | Published - 2018 |
Event | CLEO: Science and Innovations, CLEO_SI 2018 - San Jose, United States Duration: 13 May 2018 → 18 May 2018 |
Publication series
Name | Optics InfoBase Conference Papers |
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Volume | Part F94-CLEO_SI 2018 |
ISSN (Electronic) | 2162-2701 |
Conference
Conference | CLEO: Science and Innovations, CLEO_SI 2018 |
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Country/Territory | United States |
City | San Jose |
Period | 13/05/18 → 18/05/18 |
Bibliographical note
Publisher Copyright:© OSA 2018.