Interference lithography for 3D photonic band gap crystal layer by layer fabrication

A. Feigel, Z. Kotler, B. Sfez, A. Arsh, M. Klebanov, V. Lyubin

Research output: Contribution to journalArticlepeer-review

2 Scopus citations
Original languageEnglish
Pages (from-to)675-678
Number of pages4
JournalMaterials Research Society Symposium - Proceedings
Volume692
StatePublished - 2002
Externally publishedYes

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