Kinetics of evaporation of barium THD precursors used for organometallic chemical vapor deposition (OMCVD) thin films

V. Burtman; M. Schieber; S. Yitzchaik; Y. Yaroslavsky

doi:10.1016/S0022-0248(97)00021-3

Kinetics of evaporation of barium THD precursors used for organometallic chemical vapor deposition (OMCVD) thin films

V. Burtman^*, M. Schieber, S. Yitzchaik, Y. Yaroslavsky

^*Corresponding author for this work

Institute of Chemistry

Research output: Contribution to journal › Article › peer-review

9 Scopus citations

Abstract

Various methods have been used to synthesize Ba(THD)₂ and its molecular structure has been studied using nuclear magnetic resonance. Compared with Raman and infrared spectroscopy it was found that NMR is very useful to determine quantitatively the decomposition through aging of Ba(THD)₂. The transport kinetics of Ba(THD)₂ has been studied under experimental conditions of a OMCVD reactor. It has been found that the freshly prepared Ba(THD)₂ by the reaction of Ba metal with THD ligand in anhydrous conditions with subsequent crystallization from methanol transported quantitatively without decomposition. A simple model shows that the transport kinetics corresponds to a diffusion controlled process.

Original language	English
Pages (from-to)	801-805
Number of pages	5
Journal	Journal of Crystal Growth
Volume	174
Issue number	1-4
DOIs	https://doi.org/10.1016/S0022-0248(97)00021-3
State	Published - Apr 1997

Keywords

Barium precursor
Kinetics of evaporation
NMR spectroscopy
OMCVD

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10.1016/S0022-0248(97)00021-3

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@article{6b793447ad34402fa9f4676c0f3e33c9,

title = "Kinetics of evaporation of barium THD precursors used for organometallic chemical vapor deposition (OMCVD) thin films",

abstract = "Various methods have been used to synthesize Ba(THD)2 and its molecular structure has been studied using nuclear magnetic resonance. Compared with Raman and infrared spectroscopy it was found that NMR is very useful to determine quantitatively the decomposition through aging of Ba(THD)2. The transport kinetics of Ba(THD)2 has been studied under experimental conditions of a OMCVD reactor. It has been found that the freshly prepared Ba(THD)2 by the reaction of Ba metal with THD ligand in anhydrous conditions with subsequent crystallization from methanol transported quantitatively without decomposition. A simple model shows that the transport kinetics corresponds to a diffusion controlled process.",

keywords = "Barium precursor, Kinetics of evaporation, NMR spectroscopy, OMCVD",

author = "V. Burtman and M. Schieber and S. Yitzchaik and Y. Yaroslavsky",

year = "1997",

month = apr,

doi = "10.1016/S0022-0248(97)00021-3",

language = "אנגלית",

volume = "174",

pages = "801--805",

journal = "Journal of Crystal Growth",

issn = "0022-0248",

publisher = "Elsevier",

number = "1-4",

}

TY - JOUR

T1 - Kinetics of evaporation of barium THD precursors used for organometallic chemical vapor deposition (OMCVD) thin films

AU - Burtman, V.

AU - Schieber, M.

AU - Yitzchaik, S.

AU - Yaroslavsky, Y.

PY - 1997/4

Y1 - 1997/4

N2 - Various methods have been used to synthesize Ba(THD)2 and its molecular structure has been studied using nuclear magnetic resonance. Compared with Raman and infrared spectroscopy it was found that NMR is very useful to determine quantitatively the decomposition through aging of Ba(THD)2. The transport kinetics of Ba(THD)2 has been studied under experimental conditions of a OMCVD reactor. It has been found that the freshly prepared Ba(THD)2 by the reaction of Ba metal with THD ligand in anhydrous conditions with subsequent crystallization from methanol transported quantitatively without decomposition. A simple model shows that the transport kinetics corresponds to a diffusion controlled process.

AB - Various methods have been used to synthesize Ba(THD)2 and its molecular structure has been studied using nuclear magnetic resonance. Compared with Raman and infrared spectroscopy it was found that NMR is very useful to determine quantitatively the decomposition through aging of Ba(THD)2. The transport kinetics of Ba(THD)2 has been studied under experimental conditions of a OMCVD reactor. It has been found that the freshly prepared Ba(THD)2 by the reaction of Ba metal with THD ligand in anhydrous conditions with subsequent crystallization from methanol transported quantitatively without decomposition. A simple model shows that the transport kinetics corresponds to a diffusion controlled process.

KW - Barium precursor

KW - Kinetics of evaporation

KW - NMR spectroscopy

KW - OMCVD

UR - http://www.scopus.com/inward/record.url?scp=0031547280&partnerID=8YFLogxK

U2 - 10.1016/S0022-0248(97)00021-3

DO - 10.1016/S0022-0248(97)00021-3

M3 - ???researchoutput.researchoutputtypes.contributiontojournal.article???

AN - SCOPUS:0031547280

SN - 0022-0248

VL - 174

SP - 801

EP - 805

JO - Journal of Crystal Growth

JF - Journal of Crystal Growth

IS - 1-4

ER -

Kinetics of evaporation of barium THD precursors used for organometallic chemical vapor deposition (OMCVD) thin films

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