Kinetics of evaporation of barium THD precursors used for organometallic chemical vapor deposition (OMCVD) thin films

V. Burtman*, M. Schieber, S. Yitzchaik, Y. Yaroslavsky

*Corresponding author for this work

Research output: Contribution to journalArticlepeer-review

9 Scopus citations

Abstract

Various methods have been used to synthesize Ba(THD)2 and its molecular structure has been studied using nuclear magnetic resonance. Compared with Raman and infrared spectroscopy it was found that NMR is very useful to determine quantitatively the decomposition through aging of Ba(THD)2. The transport kinetics of Ba(THD)2 has been studied under experimental conditions of a OMCVD reactor. It has been found that the freshly prepared Ba(THD)2 by the reaction of Ba metal with THD ligand in anhydrous conditions with subsequent crystallization from methanol transported quantitatively without decomposition. A simple model shows that the transport kinetics corresponds to a diffusion controlled process.

Original languageAmerican English
Pages (from-to)801-805
Number of pages5
JournalJournal of Crystal Growth
Volume174
Issue number1-4
DOIs
StatePublished - Apr 1997

Keywords

  • Barium precursor
  • Kinetics of evaporation
  • NMR spectroscopy
  • OMCVD

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