Laser patterning of metallic films via buffer layer

Gabriel Kerner; Micha Asscher

doi:10.1016/j.susc.2004.02.039

Laser patterning of metallic films via buffer layer

Gabriel Kerner, Micha Asscher^*

^*Corresponding author for this work

Institute of Chemistry

Research output: Contribution to journal › Article › peer-review

21 Scopus citations

Abstract

A novel method is presented for a single pulse laser-patterning of variable width conducting lines on solid surfaces. Employing laser induced thermal desorption (LITD), potassium coverage grating on top of multilayer Xe is formed on Ru(0 0 1) at 20 K. Optical second harmonic-diffraction measurements were performed to characterize the grating as a function of Xe layer thickness and laser power density. Upon annealing to 80 K, the Xe layer desorbs and the metallic pattern softly lands on the substrate. The potential application of this procedure for the parallel writing of conducting wires millimeters long and less than 50 nm wide is discussed.

Original language	English
Pages (from-to)	5-12
Number of pages	8
Journal	Surface Science
Volume	557
Issue number	1-3
DOIs	https://doi.org/10.1016/j.susc.2004.02.039
State	Published - 20 May 2004

Keywords

Growth
Laser induced thermal desorption (LITD)
Laser methods
Metallic films
Second harmonic generation
Second harmonic generation methods

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10.1016/j.susc.2004.02.039

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title = "Laser patterning of metallic films via buffer layer",

abstract = "A novel method is presented for a single pulse laser-patterning of variable width conducting lines on solid surfaces. Employing laser induced thermal desorption (LITD), potassium coverage grating on top of multilayer Xe is formed on Ru(0 0 1) at 20 K. Optical second harmonic-diffraction measurements were performed to characterize the grating as a function of Xe layer thickness and laser power density. Upon annealing to 80 K, the Xe layer desorbs and the metallic pattern softly lands on the substrate. The potential application of this procedure for the parallel writing of conducting wires millimeters long and less than 50 nm wide is discussed.",

keywords = "Growth, Laser induced thermal desorption (LITD), Laser methods, Metallic films, Second harmonic generation, Second harmonic generation methods",

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AU - Kerner, Gabriel

AU - Asscher, Micha

PY - 2004/5/20

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N2 - A novel method is presented for a single pulse laser-patterning of variable width conducting lines on solid surfaces. Employing laser induced thermal desorption (LITD), potassium coverage grating on top of multilayer Xe is formed on Ru(0 0 1) at 20 K. Optical second harmonic-diffraction measurements were performed to characterize the grating as a function of Xe layer thickness and laser power density. Upon annealing to 80 K, the Xe layer desorbs and the metallic pattern softly lands on the substrate. The potential application of this procedure for the parallel writing of conducting wires millimeters long and less than 50 nm wide is discussed.

AB - A novel method is presented for a single pulse laser-patterning of variable width conducting lines on solid surfaces. Employing laser induced thermal desorption (LITD), potassium coverage grating on top of multilayer Xe is formed on Ru(0 0 1) at 20 K. Optical second harmonic-diffraction measurements were performed to characterize the grating as a function of Xe layer thickness and laser power density. Upon annealing to 80 K, the Xe layer desorbs and the metallic pattern softly lands on the substrate. The potential application of this procedure for the parallel writing of conducting wires millimeters long and less than 50 nm wide is discussed.

KW - Growth

KW - Laser induced thermal desorption (LITD)

KW - Laser methods

KW - Metallic films

KW - Second harmonic generation

KW - Second harmonic generation methods

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VL - 557

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JO - Surface Science

JF - Surface Science

IS - 1-3

ER -

Laser patterning of metallic films via buffer layer

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Keywords

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