Measurements of the photocurrent enhancement of reverse-biased silicon photodiodes in the 0.05-1.5-keV photon-energy range

M. J. May, M. Finkenthal, S. P. Regan, H. W. Moos, K. W. Wenzel

Research output: Contribution to journalArticlepeer-review

Abstract

The measured photocurrents from two different p-n-junction silicon photodiodes at 170-Å (73-eV) and at 8.34-Å (1480-eV) light are presented. One is a standard extreme-UV photodiode fabricated on low-resistivity silicon (70-100 Ω cm), and the other is fabricated on high-resistivity silicon (>2 × 104 Ω cm). The photocurrents from the diode on high-resistivity silicon are at least an order of magnitude greater than the photocurrents from the diode on low-resistivity silicon when a reverse bias of 40 V is applied to each. This photocurrent enhancement is 15.4 ± 4 at 8.34 Å and 12.5 ± 2 at 170 Å.

Original languageEnglish
Pages (from-to)4637-4639
Number of pages3
JournalApplied Optics
Volume34
Issue number22
DOIs
StatePublished - Aug 1995
Externally publishedYes

Keywords

  • Measured enhanced gain
  • Reverse-biased diode
  • Soft-x-ray photodetector
  • XUV photodiode

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