Abstract
The measured photocurrents from two different p-n-junction silicon photodiodes at 170-Å (73-eV) and at 8.34-Å (1480-eV) light are presented. One is a standard extreme-UV photodiode fabricated on low-resistivity silicon (70-100 Ω cm), and the other is fabricated on high-resistivity silicon (>2 × 104 Ω cm). The photocurrents from the diode on high-resistivity silicon are at least an order of magnitude greater than the photocurrents from the diode on low-resistivity silicon when a reverse bias of 40 V is applied to each. This photocurrent enhancement is 15.4 ± 4 at 8.34 Å and 12.5 ± 2 at 170 Å.
Original language | English |
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Pages (from-to) | 4637-4639 |
Number of pages | 3 |
Journal | Applied Optics |
Volume | 34 |
Issue number | 22 |
DOIs | |
State | Published - Aug 1995 |
Externally published | Yes |
Keywords
- Measured enhanced gain
- Reverse-biased diode
- Soft-x-ray photodetector
- XUV photodiode