Meeting reliability requirements for 300-mm CMP manufacturing using integrated metrology

^*Corresponding author for this work

Research output: Contribution to journal › Article › peer-review

2 Scopus citations

Cite this

@article{ccf93c69c22f4c7abc70272062f70550,

title = "Meeting reliability requirements for 300-mm CMP manufacturing using integrated metrology",

author = "Hirofumi Seo and Ori Braitbart",

year = "2006",

language = "אנגלית",

volume = "24",

pages = "45",

journal = "MICRO",

issn = "1081-0595",

publisher = "Multidisciplinary Digital Publishing Institute (MDPI)",

number = "6",

}

TY - JOUR

T1 - Meeting reliability requirements for 300-mm CMP manufacturing using integrated metrology

AU - Seo, Hirofumi

AU - Braitbart, Ori

PY - 2006

Y1 - 2006

UR - http://www.scopus.com/inward/record.url?scp=33845645786&partnerID=8YFLogxK

M3 - ???researchoutput.researchoutputtypes.contributiontojournal.article???

AN - SCOPUS:33845645786

SN - 1081-0595

VL - 24

SP - 45

JO - MICRO

JF - MICRO

IS - 6

ER -