MEMS-based alignment of optical components

Dennis S Greywall (Inventor), Dan Mark Marom (Inventor)

Research output: Patent


A MEMS device that enables an optical subsystem (e.g., an optical switch) having an optical component optically coupled to the MEMS device via free space to achieve optical alignment between the optical component and the MEMS device without moving the optical component with respect to the stationary part of the MEMS device. In one embodiment, a MEMS device of the invention has a stationary part and a movable part movably connected to the stationary part. The movable part has a platform and a plurality of mirrors mounted on the platform, wherein (i) each mirror is adapted to move with respect to the platform independent of other mirrors and (ii) the platform is adapted to move with respect to the stationary part together with the mirrors.

Original languageAmerican English
Patent numberUS2007058899
IPCG02B 6/ 26 A I
Priority date13/09/05
StatePublished - 15 Mar 2007


Dive into the research topics of 'MEMS-based alignment of optical components'. Together they form a unique fingerprint.

Cite this