MEMS mirror array for a wavelength selective 1×K switch

D. López*, F. Pardo, V. Aksyuk, M. E. Simon, H. R. Shea, D. M. Marom, D. T. Neilson, R. Cirelli, F. Klemens, W. Mansfield, L. Fetter, E. Bower, J. Miner, T. Sorsch

*Corresponding author for this work

Research output: Contribution to journalConference articlepeer-review

8 Scopus citations


We present a new MEMS mirror device that fulfills the requirements needed for its use in a wavelength selective switch. The MEMS device consists of a 1D array of individually controllable tilt micromirrors with almost 100% filling factor. Each mirror in the array is used to manipulate an individual wavelength channel, attenuating or redirecting it into a different output. The mirrors are electrostatically rotated around a fixed pivot and they use a novel concept of angle amplification to increase their out-of-plane angular rotation. A detailed analysis of their mechanical and optical response is presented.

Original languageAmerican English
Pages (from-to)445-455
Number of pages11
JournalProceedings of SPIE - The International Society for Optical Engineering
Volume5116 II
StatePublished - 2003
Externally publishedYes
EventSmart Sensors, Actuators, and MEMS - Maspalonas, Gran Canaria, Spain
Duration: 19 May 200321 May 2003


  • Angle amplification
  • Gain equalizer
  • Optical MEMS
  • Tunable filters
  • Wavelength switch


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