MEMS mirror array for a wavelength selective 1×K switch

D. López; F. Pardo; V. Aksyuk; M. E. Simon; H. R. Shea; D. M. Marom; D. T. Neilson; R. Cirelli; F. Klemens; W. Mansfield; L. Fetter; E. Bower; J. Miner; T. Sorsch

doi:10.1117/12.504381

MEMS mirror array for a wavelength selective 1×K switch

D. López^*, F. Pardo, V. Aksyuk, M. E. Simon, H. R. Shea, D. M. Marom, D. T. Neilson, R. Cirelli, F. Klemens, W. Mansfield, L. Fetter, E. Bower, J. Miner, T. Sorsch

^*Corresponding author for this work

Research output: Contribution to journal › Conference article › peer-review

8 Scopus citations

Abstract

We present a new MEMS mirror device that fulfills the requirements needed for its use in a wavelength selective switch. The MEMS device consists of a 1D array of individually controllable tilt micromirrors with almost 100% filling factor. Each mirror in the array is used to manipulate an individual wavelength channel, attenuating or redirecting it into a different output. The mirrors are electrostatically rotated around a fixed pivot and they use a novel concept of angle amplification to increase their out-of-plane angular rotation. A detailed analysis of their mechanical and optical response is presented.

Original language	English
Pages (from-to)	445-455
Number of pages	11
Journal	Proceedings of SPIE - The International Society for Optical Engineering
Volume	5116 II
DOIs	https://doi.org/10.1117/12.504381
State	Published - 2003
Externally published	Yes
Event	Smart Sensors, Actuators, and MEMS - Maspalonas, Gran Canaria, Spain Duration: 19 May 2003 → 21 May 2003

Keywords

Angle amplification
Gain equalizer
Optical MEMS
Tunable filters
Wavelength switch

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10.1117/12.504381

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López, D., Pardo, F., Aksyuk, V., Simon, M. E., Shea, H. R., Marom, D. M., Neilson, D. T., Cirelli, R., Klemens, F., Mansfield, W., Fetter, L., Bower, E., Miner, J., & Sorsch, T. (2003). MEMS mirror array for a wavelength selective 1×K switch. Proceedings of SPIE - The International Society for Optical Engineering, 5116 II, 445-455. https://doi.org/10.1117/12.504381

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abstract = "We present a new MEMS mirror device that fulfills the requirements needed for its use in a wavelength selective switch. The MEMS device consists of a 1D array of individually controllable tilt micromirrors with almost 100% filling factor. Each mirror in the array is used to manipulate an individual wavelength channel, attenuating or redirecting it into a different output. The mirrors are electrostatically rotated around a fixed pivot and they use a novel concept of angle amplification to increase their out-of-plane angular rotation. A detailed analysis of their mechanical and optical response is presented.",

keywords = "Angle amplification, Gain equalizer, Optical MEMS, Tunable filters, Wavelength switch",

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T1 - MEMS mirror array for a wavelength selective 1×K switch

AU - López, D.

AU - Pardo, F.

AU - Aksyuk, V.

AU - Simon, M. E.

AU - Shea, H. R.

AU - Marom, D. M.

AU - Neilson, D. T.

AU - Cirelli, R.

AU - Klemens, F.

AU - Mansfield, W.

AU - Fetter, L.

AU - Bower, E.

AU - Miner, J.

AU - Sorsch, T.

PY - 2003

Y1 - 2003

N2 - We present a new MEMS mirror device that fulfills the requirements needed for its use in a wavelength selective switch. The MEMS device consists of a 1D array of individually controllable tilt micromirrors with almost 100% filling factor. Each mirror in the array is used to manipulate an individual wavelength channel, attenuating or redirecting it into a different output. The mirrors are electrostatically rotated around a fixed pivot and they use a novel concept of angle amplification to increase their out-of-plane angular rotation. A detailed analysis of their mechanical and optical response is presented.

AB - We present a new MEMS mirror device that fulfills the requirements needed for its use in a wavelength selective switch. The MEMS device consists of a 1D array of individually controllable tilt micromirrors with almost 100% filling factor. Each mirror in the array is used to manipulate an individual wavelength channel, attenuating or redirecting it into a different output. The mirrors are electrostatically rotated around a fixed pivot and they use a novel concept of angle amplification to increase their out-of-plane angular rotation. A detailed analysis of their mechanical and optical response is presented.

KW - Angle amplification

KW - Gain equalizer

KW - Optical MEMS

KW - Tunable filters

KW - Wavelength switch

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EP - 455

JO - Proceedings of SPIE - The International Society for Optical Engineering

JF - Proceedings of SPIE - The International Society for Optical Engineering

T2 - Smart Sensors, Actuators, and MEMS

Y2 - 19 May 2003 through 21 May 2003

ER -

MEMS mirror array for a wavelength selective 1×K switch

Abstract

Keywords

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