MEMS spatial light modulator for phase and amplitude modulation of spectrally dispersed light

Jonathan Dunayevsky, Dan M. Marom

Research output: Contribution to journalArticlepeer-review

7 Scopus citations


We present a new micro-electro-mechanical system (MEMS) spatial light modulator (SLM) with a two-dimensional array of tightly-spaced square micromirrors (or pixels) designed to sag (or piston motion). This diffractive MEMS modulator is to be used for independently applying amplitude attenuation and phase control to spectrally-dispersed light along one dimension. The spectral phase and amplitude modulator operate in conjunction with a dispersive optical setup, where spatially resolved frequency components are to be incident onto and independently modulated by the device. The MEMS design is based on two common actuators per array column, in order to set the two degrees of freedom of amplitude and phase for every spectral component. This MEMS SLM is thus optimal in actuator/electrode count, especially when compared to conventional SLM where each pixel is independently actuated. The MEMS sag range is compatible with near-IR wavelengths used in the fiber-optic communication band.

Original languageAmerican English
Article number6547158
Pages (from-to)1213-1221
Number of pages9
JournalJournal of Microelectromechanical Systems
Issue number5
StatePublished - 2013

Bibliographical note

Funding Information:
The work presented in this paper is a result of the research activities of the Strategic Research Center for the 4th Generation District Heating (4DH), which has received funding from the Danish Council for Strategic Research. This study is also supported by the National Natural Science Foundation of China (Grant No. 71573152).


  • Microelectromechanical device
  • Microelectromechanical systems
  • Optical modulation


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