We present our recent progress on the design, fabrication and characterization of metamaterials that can be used as basic building blocks for "free space on a chip" nanophotonic system integration. These devices are realized by fabricating nanostructures with space variant duty cycle on Silicon on insulator (SOI) material platform. The devices are characterized with Heterodyne Nearfield Scanning Optical Microscope that allows a direct measurement of both amplitude and phase of the near field. Using the described concept, we show specific examples of light bending, focusing and splitting. A design for mode matching between two different waveguides is also shown.