MM-wave near-field scanning resistivity microscope

M. Golosovsky*, D. Davidov

*Corresponding author for this work

Research output: Contribution to journalConference articlepeer-review

Abstract

A near-field mm-wave scanning microscope was used to image the resistivity of different materials. This technique uses a resonant slit antenna as a scanning probe which is scanned over the surface under study while the reflection/transmission from the surface is measured. The spatial resolution of the near-field imaging is not limited by the wavelength and may be less than a micron, however, calculation of the field distribution in the near-field imaging is difficult which makes it less quantitative than the far-field imaging. Therefore, the spatial resolution and the contrast in the near-field imaging strongly depend on the probe-sample separation.

Original languageEnglish
Pages (from-to)1333-1334
Number of pages2
JournalIEEE MTT-S International Microwave Symposium Digest
Volume3
StatePublished - 1997
EventProceedings of the 1997 IEEE MTT-S International Microwave Symposium. Part 1 (of 3) - Denver, CO, USA
Duration: 8 Jun 199713 Jun 1997

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