Monolayer contact doping of silicon surfaces and nanowires using organophosphorus compounds

Keyphrases

• Nanowires 100%
• Organophosphorus Pesticides 100%
• Silicon Surface 100%
• Contact Doping 100%
• Silicon Nanowires (SiNWs) 100%
• Silicon Substrate 75%
• Dopant Sources 50%
• Ethanol 25%
• Phosphorus 25%
• Annealing 25%
• Electrical Properties 25%
• Dielectric 25%
• Nanometer Scale 25%
• 4-point 25%
• Gold Nanoparticles 25%
• Field-effect Transistors 25%
• Semiconductor Devices 25%
• Ultra-shallow 25%
• Dopant Atoms 25%
• Silicon Wafer 25%
• Silicon Nitride 25%
• Doping Profile 25%
• Doping Process 25%
• Device Analyzer 25%
• Photolithography Process 25%
• Silicon Target 25%
• Nanowire Growth 25%
• Vapor-liquid-solid Mechanism 25%
• Nanowire Devices 25%
• Phosphorus Dopant 25%
• Methylene Diphosphonate 25%
• Chemical Vapor Deposition Processes 25%
• Surface Doping 25%
• Sheet Resistance 25%
• Probe Station 25%
• Metal Electrode 25%

Engineering

• Silicon Surface 100%
• Nanowire 100%
• Monolayers 100%
• Dopants 37%
• Silicon Substrate 37%
• Dielectrics 12%
• Nanometre 12%
• Nitride 12%
• Field-Effect Transistor 12%
• Semiconductor Device 12%
• Deposition Process 12%
• Optical Lithography 12%
• Chemical Vapor Deposition 12%
• Probe Point 12%
• Sonication 12%
• Silicon Wafer 12%
• Nanowire Device 12%
• Sheet Resistance 12%
• Vapor Deposition 12%
• Gold Nanoparticle 12%

Material Science

• Silicon 100%
• Nanowire 100%
• Monolayers 100%
• Surface (Surface Science) 100%
• Doping (Additives) 33%
• Gold Nanoparticle 11%
• Field Effect Transistor 11%
• Semiconductor Device 11%
• Silicon Nitride 11%
• Chemical Vapor Deposition 11%
• Silicon Wafer 11%
• Vapor Phase Deposition 11%
• Dielectric Material 11%