Monolithic fringe-field-activated crystalline silicon tilting-mirror devices

Dennis S. Greywall^*, Chien Shing Pai, Sang Hyun Oh, Chorng Ping Chang, Dan M. Marom, Paul A. Busch, Raymond A. Cirelli, J. Ashley Taylor, Fred P. Klemens, Thomas W. Sorsch, John Eric Bower, Warren Y.C. Lai, Hyongsok T. Soh

^*Corresponding author for this work

Research output: Contribution to journal › Article › peer-review