Abstract
Photoluminescence (PL) spectra and Raman scattering spectra of Si-SiO x systems, prepared by radio frequency magnetron sputtering method and thermal annealed at 1150°C for creation of Si nano-crystallites, were investigated as a function of Si content and Si nano-crystallite sizes. It was shown that the PL spectrum of such systems consists of several bands with peak positions at 1.32-1.34, 1.42-1.58, 1.77, 2.05 and 2.30eV. The dependencies of these PL band parameters on concentration and size of Si nano-crystallites in the Si-SiOx system have been investigated and analyzed. The nature of radiative optical transitions for all PL bands is discussed.
| Original language | English |
|---|---|
| Pages (from-to) | 1119-1123 |
| Number of pages | 5 |
| Journal | Physica B: Condensed Matter |
| Volume | 340-342 |
| DOIs | |
| State | Published - 31 Dec 2003 |
| Event | Proceedings of the 22nd International Conference on Defects in (ICDS-22) - Aarhus, Denmark Duration: 28 Jul 2003 → 1 Aug 2003 |
Keywords
- Photoluminescence
- Quantum dots
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