Near-field nanofabrication with pipette guided ArF excimer laser

Keyphrases

• Nanofabrication 100%
• Control Method 100%
• Pipette 100%
• ArF Excimer Laser 100%
• Distance Control 100%
• Near-field 100%
• Near-field Optical 100%
• Systems-based 50%
• High Energy 50%
• Evanescent Field 50%
• Capacitance 50%
• Nanopatterning 50%
• Accurate Distance 50%
• Atomic Force 50%
• Optical Methods 50%
• Laser Pulse 50%
• Force Sensing 50%
• Excimer Laser 50%
• Feedback System 50%
• Field Detection 50%
• Feedback Technique 50%
• Severe Disturbance 50%
• Direct Ablation 50%

Engineering

• Excimer Laser 100%
• Nano-Fabrication 100%
• Optical Field 66%
• Evanescent 33%
• Nanopatterning 33%
• Direct Ablation 33%